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semiconductor wafer


Redefining Semiconductor Manufacturing

A small footprint, high precision, low operating temperatures, and performance are all requirements in the semiconductor industry. Genesis has compact solutions in both the LDD and the LDX series of motors. Our motors reduce the footprint of system assemblies, increase range of motion, decrease the weight of an assembly, and increase density of tooling within the same space. Genesis’ LiveDrive direct drive motors have industry leading torque density both by torque-to-mass and torque-to-length.

Our direct drive motors improve performance.

Settling time is significantly decreased by coupling the motor directly to the load. With the increased available torque, a load can accelerate to the required speed and complete the motion profile more efficiently. The electromagnetic design of our direct drive motors creates a higher motor constant value. Our motors can generate the same amount of torque as other motors, without generating as much heat.

Application -Semiconductor Manufacturing

Genesis direct drive motors with high Km values are vital. They ensure that future semiconductor production equipment is equal to any task. Genesis produces the most torque dense direct drive motors with the highest Km values – an ideal solution.

More on Semiconductor Manufacturing

close up photo of semiconductors

Application – Wafer Handling Arms

Genesis direct drive motors remove belts and gears from wafer handling arms, reducing overall assembly height. The high torque density of LiveDrive makes the robot arms more compact which increases the working volume of a robot, and the high motor-constant results in a lower temperature rise which reduces wafer defects.

More on Wafer Handling


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