Semiconductor
Redefining Semiconductor Manufacturing
A small footprint, high precision, low operating temperatures, and performance are all requirements in the semiconductor industry. Genesis has compact solutions in both the LDD and the LDX series of motors. Our motors reduce the footprint of system assemblies, increase range of motion, decrease the weight of an assembly, and increase density of tooling within the same space. Genesis’ LiveDrive direct drive motors have industry leading torque density along with superior torque to length, torque to mass, and motor constant (Km).
Our direct drive motors improve performance
Settling time is significantly decreased by coupling the motor directly to the load. With the increased available torque, a load can accelerate to the required speed and complete the motion profile more efficiently. The electromagnetic design of our direct drive motors creates a higher motor constant value. Our motors can generate the same amount of torque as other motors, without generating as much heat.
LiveDrive Advantage in Semiconductor
- Innovative technologies based on patented electro magnetics
- Superior motor constant, less power dissipated and lower temperature rise
- Superior torque to length, torque to mass, and motor constant
- Winding options for different voltages or speed requirements
- Variety of sizes, stack lengths, and torque ratings
Application -Semiconductor Manufacturing
Genesis direct drive motors with high Km values are vital. They ensure that future semiconductor production equipment is equal to any task. Genesis produces the most torque dense direct drive motors with the highest Km values – an ideal solution.
Application – Wafer Handling Arms
Genesis direct drive motors remove belts and gears from wafer handling arms, reducing overall assembly height. The high torque density of LiveDrive makes the robot arms more compact which increases the working volume of a robot, and the high motor-constant results in a lower temperature rise which reduces wafer defects.
