Semiconductor Manufacturing – Wafer Handling
Within the semiconductor industry, wafer handling systems are designed to move silicon wafers during the semiconductor manufacturing process. Semiconductor fabrication is sensitive to dust or other particulate matter, and most operations are conducted in a cleanroom environment.
Removing any excess moving parts from a system – such as belts and gears – can reduce the risk of particles landing on the wafer which helps prevent production defects. Less parts in a system also increases reliability of the robot which helps to reduce unplanned downtime and overall maintenance costs.
Direct Drive Motor Benefits
- Increased z-axis travel
- Fewer components, leads to higher MTBF
- Higher cleanliness due to fewer components
- Lower operating temperature, leads to fewer wafer defects
Wafer Handling System Example
Genesis direct drive motors remove belts and gears from wafer handling arms, reducing overall assembly height. The high torque density of LiveDrive makes the robot arms more compact which increases the working volume of a robot, and the high motor-constant results in a lower temperature rise which reduces wafer defects.